HM5000 热质质量流量控制器

OUTLINE

HM5000 series is Thermal Mass Flowmeter and Controller, which measure various kinds of gas.

The flow rate of gas from 5mL/min(nor) to 400L/min(nor) can be measured and controlled without being influenced by the change in temperature and pressure.

There are two types available: Mass Flowmeter to measure flow rate and Mass Flow Controller with control valve built in, and also avail- able in high performance and wide use types. Selection can be made depending upon the applications.

 

FEATURES

❏ Flow rate measurment in wide range

Available for wide range from 0 to 5mL/min(nor) to 0 to 400 L/min (nor).

❏ High accuracy

±1%F.S. (High performance type)

❏ Miniaturization and improvement of reliability

❏ The following functions possible to add optionally.

Slow start function (Normal close type) Output signal : 1 to 5VDC

 

APPLICATIONS

❏ Utility gas supply lines in industries

❏ Various instruments for analysis

❏ Semiconductor gas supply lines

❏ Gas constant flow control and mixture control

❏ Embedded devices